Daikin Industries, Ltd. PFC-C318 (C4F8)
Daikin Industries, Ltd. PFC-C318 (C4F8) is a high-purity gas tailored for semiconductor manufacturing. With a purity level of 99.99 vol% (4N) or greater, it excels at etching SiO₂ and low-k films. Additionally, it's apt for the Bosch process, particularly in side wall protection, serving the electrical and electronics industry for parts and component fabrication.
Properties
- Physical Form
- Gas
Product families
Applications
- Semiconductor Manufacturing
Product Families
- Electronic Chemicals
Other characteristics
- Functions
- Etchant
- Applicable Processes
- Semiconductor Manufacturing
- Markets
- Electrical & Electronics
- Technology
- Industrial Additives & Materials
- Labeling Claims
- High Purity
- ChemicalFormula
- C₄F₈
- Inspection Items
Purity (excluding air content), other fluorocarbons, acid content, moisture, air content.
- HIGHLIGHTS
Purity is 99.99vol% (4N) or more for semiconductor manufacturing.; Mainly suitable for etching SiO2 and low-k films.; Suitable for Bosch process side wall protection.
- Packing Specification
- 10L container, 47L container, etc.
- Industrial Additives Functions
- Etchant
- Safety Information
Be sure to read the Safety Data Sheet (SDS) and precautions on the label before using.. This product has been developed for industrial purposes and we shall not guarantee the the safety if used for any other purposes. If it is going to be used for medical or food applications, please contact us in advice.
Technical data
Table 1 of 1
3 rows| Characteristic | Value | Unit |
|---|---|---|
| Boiling Point | -5.85 | °C |
| Molecular Weight | 200.01 | — |
| Vapor Pressure (at 20°C) | 0.266 | MPa |
