Semitron® CMP XL20
- Chemical Family
- Polyamides
Semitron® CMP XL20 Polyamideimide PAI shapes were specifically developed for CMP ring applications in the semiconductor and electronics industry, due to their excellent long wear life in CMP slurries. In addition to these characteristics, Semitron® CMP XL20 PAI components display high strength and stiffness, and outstanding wear resistance over a broad range of temperatures, making this grade the ideal solution for dynamic applications in process environments.Features:Specifically developed for CMP ring applications in the semiconductor and electronics industryExcellent long wear life in CMP slurriesHigh strength and stiffnessOutstanding wear resistance over a broad range of temperaturesBenefits:Ideal solution for dynamic applications in process environmentsSignificantly lower cost per waferOutperforms PPS up to 20x in most processesPromotes fewer edge defects and better uniformityApplications:CMP ring applications in the semiconductor and electronics industryCan be used in clamp rings, trench rings, screws, pins, and shower headsSuitable for use in centering pins, focus rings, insulators, vacuum pads, and wafer guides.
Properties
- Physical Form
- Plates, Rods, Tube
- Plates
- Rods
- Tube
Product families
- Semiconductor Manufacturing
Other characteristics
- Brand
- Semitron®
- Density
- 1,400.0 kg/m³
- Features
Cost Effective, High Stiffness, High Strength, High Tolerance, Odorless, Wear Resistant
- Polymer Name
- Polyamide-imide (PAI)
- Tensile Modulus
- 3,962.9 MPa
- Color (Properties)
- Green
- Markets
- Electrical & Electronics
- Flame Rating
- UL 94 V0
- Technology
- Plastics
- Labeling Claims
- Odor-free
- Product Families
- Plastics — Parts, Shapes & Films
- Product Features
Significantly lower cost per wafer; Outperforms PPS up to 20x in most processes; High strength and stiffness promotes fewer edge defects and better uniformity; Next generation CMP Ring material for Semicon Industry; Extremely long wear life in CMP slurry
- Color
- Green
- Material Features
- Cost Effective
- High Stiffness
- High Strength
- High Tolerance
- Odorless
- Wear Resistant
- Chemical Inventories
- TSCA (USA)
- TSCA Exempt (USA)
- Certifications and Compliance
- UL 94
- Plastics and Elastomers End Uses
- Electrical/Electronic Applications
- Semiconductor Applications
Technical data
Table 1 of 4
9 rows| Characteristic | Value | Unit | Method |
|---|---|---|---|
| Tensile Strength | 20000 | psi | ASTM D638 (8) |
| Tensile Strain (Elongation) at Break | 8.8 | % | ASTM D638 (8) |
| Tensile Strain (Elongation) at Break | 10 | % | ASTM D638 (8) |
| Tensile Modulus of Elasticity | 575 | ksi | ASTM D638 (8) |
| Shear Strength | 16000 | psi | ASTM D732 |
| Compressive Strength | 24000 | psi | ASTM D695 (11) |
| Flexural Strength | 24000 | psi | ASTM D790 (13) |
| Flexural Modulus of Elasticity | 600 | ksi | ASTM D790 |
| Hardness (14) | 120 | Rockwell M | ASTM D785 |
Table 2 of 4
6 rows| Characteristic | Value | Unit | Method |
|---|---|---|---|
| Glass Transition Temperature (DMA, Tan Delta) | 527 | °F | DMA |
| Thermal Conductivity (73°F) | 1.8 | BTU in./(hr. ft² ˚F) | — |
| Coefficient of Linear Thermal Expansion (-40 to 300°F) | 17 | µin./in./°F | ASTM E-831 (TMA) |
| Heat Deflection Temperature (Method A: 1.8 MPa (264 PSI)) | 532 | °F | ASTM D648 |
| Continuous Allowable Service Temperature in Air (20.000 hrs) (3) | 500 | °F | — |
| Flammability (3 mm) (5) | V-0 | — | UL 94 |
Table 3 of 4
4 rows| Characteristic | Value | Unit | Method |
|---|---|---|---|
| Electric Strength | 580 | Volts/mil | ASTM D149 |
| Surface Resistivity | 10000000000000 | Ohm/sq. | ANSI/ESD STM 11.11 |
| Dielectric Constant (1 MHz) | 4.2 | — | — |
| Dissipation Factor (1 MHz) | 0.026 | — | — |
Table 4 of 4
5 rows| Characteristic | Value | Unit | Method |
|---|---|---|---|
| Specific Gravity | 1.4 | — | ASTM D792 |
| Water Absorption (After 24h Immersion in Water of 73°F) | 0.4 | % | ASTM D570 (17) |
| Water Absorption (At Saturation in Water of 73°F) | 1.7 | % | ASTM D570 (17) |
| Wear Rate | 1000 | in³.min/ft.lbs.hr x 10⁻¹⁰ | QTM 55010 (19) |
| Limiting PV (100 FPM) | 4000 | ft.lbs/in².min | QTM 55007 (21) |
